Silica deposition by excimer-laser-induced chemical vapour deposition in perpendicular configuration

  1. Leon, Betty
  2. Klumpp, Armin
  3. Gonzalez, Pio
  4. Parada, Eduardo G.
  5. Fernandez, Dolores
  6. Pou, Juan
  7. Serra, Julia
  8. Sigmund, Hermann
  9. Perez-Amor, Mariano
Aldizkaria:
Advanced Materials for Optics and Electronics

ISSN: 1057-9257

Argitalpen urtea: 1996

Alea: 6

Zenbakia: 2

Orrialdeak: 83-92

Mota: Artikulua

DOI: 10.1002/(SICI)1099-0712(199603)6:2<83::AID-AMO225>3.0.CO;2-P GOOGLE SCHOLAR
Datuen iturria: Scopus