Accurate interferometric system to perform the substrate focusing and alignment in laser writing processes

  1. Salgueiro, J.R.
  2. Román, J.F.
  3. Moreno, V.
Aldizkaria:
Journal of Modern Optics

ISSN: 1362-3044,  0950-0340

Argitalpen urtea: 1997

Alea: 44

Zenbakia: 6

Orrialdeak: 1065-1072

Mota: Artikulua

DOI: 10.1080/09500349708230719 GOOGLE SCHOLAR
Datuen iturria: Scopus