Excimer laser CVD of silicon oxide on GaAs: a comparison with deposition on c-Si

  1. González, P.
  2. García, E.
  3. Pou, J.
  4. Fernández, D.
  5. León, B.
  6. Pérez-Amor, M.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 1992

Volume: 54

Issue: C

Pages: 108-111

Type: Article

DOI: 10.1016/0169-4332(92)90027-U GOOGLE SCHOLAR
Data source: Scopus