Surface evaluation combining the moire effect and phase-stepping techniques in Fizeau interferometry

  1. Dorrio, Benito V.
  2. Blanco-Garcia, Jesus
  3. Doval, A.F.
  4. Lopez, C.
  5. Soto, R.
  6. Bugarin, J.
  7. Fernandez, J.L.
  8. Perez-Amor, Mariano
Actas:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 9780819421111

Ano de publicación: 1996

Volume: 2730

Páxinas: 346-349

Tipo: Achega congreso

DOI: 10.1117/12.231093 GOOGLE SCHOLAR