Influence of laser fluence in ArF-excimer laser assisted crystallisation of a-SiGe:H films

  1. Chiussi, S.
  2. López, E.
  3. Serra, J.
  4. González, P.
  5. Serra, C.
  6. León, B.
  7. Fabbri, F.
  8. Fornarini, L.
  9. Martelli, S.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 2003

Volume: 208-209

Issue: 1

Pages: 358-363

Type: Conference paper

DOI: 10.1016/S0169-4332(02)01399-5 GOOGLE SCHOLAR
Data source: Scopus