High-resolution electron microscopy study of SiGeC thin films grown on Si(1 0 0) by laser-assisted techniques

  1. Lioutas, Ch.B.
  2. Frangis, N.
  3. Soumelidis, S.
  4. Chiussi, S.
  5. López, E.
  6. León, B.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 2006

Volume: 252

Issue: 13 SPEC. ISS.

Pages: 4527-4530

Type: Article

DOI: 10.1016/J.APSUSC.2005.07.129 GOOGLE SCHOLAR

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