Liquid source misted chemical deposition process of three-dimensional nano-ferroelectrics with substrate heating
- Kawasaki, S.
- Scott, J.F.
- Fan, H.
- Catalan, G.
- Saad, M.M.
- Gregg, J.M.
- Correa, M.A.
- Morrison, F.D.
- Tatsuta, T.
- Tsuji, O.
ISSN: 1058-4587, 1607-8489
Year of publication: 2007
Volume: 95
Issue: 1
Pages: 180-186
Type: Conference paper