Effect of hydrogen on surface texturing and crystallization on a-si:H thin film irradiated by excimer laser

  1. Wang, H.
  2. Lusquiños, F.
  3. Yao, Y.L.
Actes de conférence:
30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011

Année de publication: 2011

Pages: 1028-1037

Type: Communication dans un congrès

DOI: 10.2351/1.5062175 GOOGLE SCHOLAR