Hydrogen-argon plasma pre-treatment for improving the anti-corrosion properties of thin Al2O3 films deposited using atomic layer deposition on steel

1. Härkönen, E.
2. Potts, S.E.
3. Kessels, W.M.M.
4. Díaz, B.
5. Seyeux, A.
6. Światowska, J.
7. Maurice, V.
8. Marcus, P.
9. Radnóczi, G.
10. Tóth, L.
11. Kariniemi, M.
12. Niinistö, J.
13. Ritala, M.