Ultra-thin aluminium oxide films deposited by plasma-enhanced atomic layer deposition for corrosion protection

1. Potts, S.E.
2. Schmalz, L.
3. Fenker, M.
4. Daz, B.
5. Wiatowska, J.
6. Maurice, V.
7. Seyeux, A.
8. Marcus, P.
9. Radnczi, G.
10. Tth, L.
11. Kessels, W.M.M.