LOW-TEMPERATURE SILICON-OXIDE FILMS DEPOSITED USING A CO2-LASER
- FERNANDEZ, D
- GONZALEZ, P
- POU, J
- LEON, B
- PEREZAMOR, M
- BOYD, IW (coord.)
ISBN: 0-444-89419-5
Argitalpen urtea: 1992
Alea: 24
Orrialdeak: 112-116
Biltzarra: SYMP ON LASER SURFACE PROCESSING AND CHARACTERIZATION, AT THE 1991 SPRING MEETING OF THE EUROPEAN MATERIALS RESEARCH SOC / INTERNATIONAL CONF ON ADVANCED MATERIALS
Mota: Biltzar ekarpena