LARGE AREA SILICA FILMS DEPOSITED ON SILICON SUBSTRATES BY A CO2-LASER
- SZORENYI, T
- GONZALEZ, P
- FERNANDEZ, D
- POU, J
- LEON, B
- PEREZAMOR, M
- LAUDE, LD (coord.)
ISBN: 0-8194-0326-1
Year of publication: 1990
Volume: 1279
Pages: 144-149
Congress: CONF ON LASER-ASSISTED PROCESSING 2
Type: Conference paper