LARGE AREA SILICA FILMS DEPOSITED ON SILICON SUBSTRATES BY A CO2-LASER

  1. SZORENYI, T
  2. GONZALEZ, P
  3. FERNANDEZ, D
  4. POU, J
  5. LEON, B
  6. PEREZAMOR, M
Book Series:
LASER-ASSISTED PROCESSING II
  1. LAUDE, LD (coord.)

ISBN: 0-8194-0326-1

Year of publication: 1990

Volume: 1279

Pages: 144-149

Congress: CONF ON LASER-ASSISTED PROCESSING 2

Type: Conference paper