Conference papers (5) Publications in which a researcher has participated

1990

  1. GAS-MIXTURE DEPENDENCE OF THE LCVD OF SIO2-FILMS USING AN ARF LASER

    SURFACE PROCESSING AND LASER ASSISTED CHEMISTRY

  2. LARGE AREA SILICA FILMS DEPOSITED ON SILICON SUBSTRATES BY A CO2-LASER

    LASER-ASSISTED PROCESSING II

  3. LASER-CVD OF AMORPHOUS SILICA AND SILICON COATINGS ON METAL SUBSTRATES

    SURFACE ENGINEERING WITH HIGH ENERGY BEAMS

  4. Large area silica films deposited on silicon substrates by a CO2 laser

    Proceedings of SPIE - The International Society for Optical Engineering

  5. Laser-CVD of amorphous silica and silicon coatings on metal substrates

    Mechanical and corrosion properties. Series A, Key engineering materials