Silicon oxide films deposited by excimer laser chemical vapour deposition

  1. Szorényi, T.
  2. González, P.
  3. Fernández, M.D.
  4. Pou, J.
  5. León, B.
  6. Pérez-Amor, M.
Revue:
Thin Solid Films

ISSN: 0040-6090

Année de publication: 1990

Volumen: 193-194

Número: PART 2

Pages: 619-626

Type: Article

DOI: 10.1016/0040-6090(90)90213-W GOOGLE SCHOLAR
La source de données: Scopus