The role of silane and N2O in the CO2 laser-CVD of silicon oxide films

  1. Fernández, D.
  2. González, P.
  3. Pou, J.
  4. García, E.
  5. Serra, J.
  6. León, B.
  7. Pérez-Amor, M.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 1993

Volume: 69

Issue: 1-4

Pages: 281-284

Type: Article

DOI: 10.1016/0169-4332(93)90519-H GOOGLE SCHOLAR
Data source: Scopus