Silicon oxide thin films grown by Xe2* excimer lamp chemical vapour deposition: the role of the substrate temperature and the window-substrate distance

  1. González, P.
  2. García, E.
  3. Pou, J.
  4. Fernández, D.
  5. Serra, J.
  6. León, B.
  7. Pérez-Amor, M.
Aldizkaria:
Thin Solid Films

ISSN: 0040-6090

Argitalpen urtea: 1994

Alea: 241

Zenbakia: 1-2

Orrialdeak: 348-351

Mota: Artikulua

DOI: 10.1016/0040-6090(94)90455-3 GOOGLE SCHOLAR
Datuen iturria: Scopus