Photochemical vapour deposition of hydrogenated amorphous silicon-carbon thin films by using a Xe 2 * excimer lamp
- Redondas, X.
- González, P.
- Chiussi, S.
- Parada, E.G.
- Pou, J.
- León, B.
- Pérez-Amor, M.
Journal:
Applied Surface Science
ISSN: 0169-4332
Year of publication: 1996
Volume: 106
Pages: 55-59
Type: Article