Photochemical vapour deposition of hydrogenated amorphous silicon-carbon thin films by using a Xe 2 * excimer lamp
- Redondas, X.
- González, P.
- Chiussi, S.
- Parada, E.G.
- Pou, J.
- León, B.
- Pérez-Amor, M.
Aldizkaria:
Applied Surface Science
ISSN: 0169-4332
Argitalpen urtea: 1996
Alea: 106
Orrialdeak: 55-59
Mota: Artikulua