Dependence on the C2H4 and SiH4 gas mixture of the Si-C film properties obtained by excimer lamp chemical vapour deposition

  1. Redondas, X.
  2. González, P.
  3. León, B.
  4. Pérez-Amor, M.
Journal:
Surface and Coatings Technology

ISSN: 0257-8972

Year of publication: 1998

Volume: 100-101

Issue: 1-3

Pages: 160-163

Type: Article

DOI: 10.1016/S0257-8972(97)00607-5 GOOGLE SCHOLAR
Data source: Scopus