Dependence on the C2H4 and SiH4 gas mixture of the Si-C film properties obtained by excimer lamp chemical vapour deposition

  1. Redondas, X.
  2. González, P.
  3. León, B.
  4. Pérez-Amor, M.
Aldizkaria:
Surface and Coatings Technology

ISSN: 0257-8972

Argitalpen urtea: 1998

Alea: 100-101

Zenbakia: 1-3

Orrialdeak: 160-163

Mota: Artikulua

DOI: 10.1016/S0257-8972(97)00607-5 GOOGLE SCHOLAR
Datuen iturria: Scopus