Structural and compositional studies of a-Si,C:H thin films obtained by excimer lamp chemical vapor deposition from acetylene and silane

  1. Redondas, X.
  2. González, P.
  3. León, B.
  4. Pérez-Amor, M.
  5. Soares, J.C.
  6. Da Silva, M.F.
Aldizkaria:
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

ISSN: 0734-2101

Argitalpen urtea: 1998

Alea: 16

Zenbakia: 2

Orrialdeak: 660-665

Mota: Artikulua

DOI: 10.1116/1.581083 GOOGLE SCHOLAR
Datuen iturria: Scopus