Postdeposition annealing of pulsed laser deposited CNx films

  1. González, P.
  2. Soto, R.
  3. Lusquiños, F.
  4. León, B.
  5. Pérez-Amor, M.
Journal:
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

ISSN: 0734-2101

Year of publication: 2000

Volume: 18

Issue: 6

Pages: 3004-3007

Type: Article

DOI: 10.1116/1.1312372 GOOGLE SCHOLAR
Data source: Scopus