Compositional, structural and optical properties of Si-rich a-SiC:H thin films deposited by ArF-LCVD

  1. López, E.
  2. Chiussi, S.
  3. Kosch, U.
  4. González, P.
  5. Serra, J.
  6. Serra, C.
  7. León, B.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 2005

Volume: 248

Issue: 1-4

Pages: 113-117

Type: Conference paper

DOI: 10.1016/J.APSUSC.2005.03.011 GOOGLE SCHOLAR
Data source: Scopus