Compositional, structural and optical properties of Si-rich a-SiC:H thin films deposited by ArF-LCVD
- López, E.
- Chiussi, S.
- Kosch, U.
- González, P.
- Serra, J.
- Serra, C.
- León, B.
ISSN: 0169-4332
Year of publication: 2005
Volume: 248
Issue: 1-4
Pages: 113-117
Type: Conference paper