Liquid source misted chemical deposition process of three-dimensional nano-ferroelectrics with substrate heating

1. Kawasaki, S.
2. Scott, J.F.
3. Fan, H.
4. Catalan, G.
5. Saad, M.M.
6. Gregg, J.M.
7. Correa, M.A.
8. Morrison, F.D.
9. Tatsuta, T.
10. Tsuji, O.