Numerical simulation of the UV-excimer laser assisted modification of amorphous hydrogenated Si/Ge bilayers to graded epitaxial heterostructures

  1. Conde, J.C.
  2. Fornarini, L.
  3. Chiussi, S.
  4. Gontad, F.
  5. González, P.
  6. Leon, B.
  7. Martelli, S.
Revue:
Thin Solid Films

ISSN: 0040-6090

Année de publication: 2008

Volumen: 517

Número: 1

Pages: 222-226

Type: Article

DOI: 10.1016/J.TSF.2008.08.076 GOOGLE SCHOLAR