Finite element simulation for ultraviolet excimer laser processing of patterned Si/SiGe/Si(100) heterostructures
- Conde, J.C.
- Martín, E.
- Chiussi, S.
- Gontad, F.
- Serra, C.
- González, P.
Journal:
Applied Physics Letters
ISSN: 0003-6951
Year of publication: 2010
Volume: 97
Issue: 1
Type: Article