Pulsed UV-laser processing of amorphous and crystalline group IV semiconductors

  1. Chiussi, S.
  2. Gontad, F.
  3. Stefanov, S.
  4. Conde, J.C.
  5. López, E.
  6. Serra, C.
  7. Benedetti, A.
  8. Serra, J.
  9. León, B.
  10. González, P.
Proceedings:
ECS Transactions

ISSN: 1938-5862 1938-6737

ISBN: 978-1-5667-7907-4

Year of publication: 2011

Volume: 41

Issue: 7

Pages: 315-330

Type: Conference paper

DOI: 10.1149/1.3633312 GOOGLE SCHOLAR