On the Physical Vapour Deposition (PVD): Evolution of Magnetron Sputtering Processes for Industrial Applications

  1. Baptista, A.
  2. Silva, F.J.G.
  3. Porteiro, J.
  4. Míguez, J.L.
  5. Pinto, G.
  6. Fernandes, L.
Proceedings:
Procedia Manufacturing

ISSN: 2351-9789

Year of publication: 2018

Volume: 17

Pages: 746-757

Type: Conference paper

DOI: 10.1016/J.PROMFG.2018.10.125 GOOGLE SCHOLAR lock_openOpen access editor
Data source: Scopus