Pyrolytic deposition of SiO2 with Co2 laser

  1. Fernández, M.D.
  2. González, P.
  3. León, B.
  4. Pérez-Amor, M.
Journal:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 1996-756X,  0277-786X

Year of publication: 1989

Volume: 1022

Pages: 100-101

Type: Article

DOI: 10.1117/12.950109 GOOGLE SCHOLAR
Data source: Scopus