Hydrogenated amorphous silicon films deposited by co2 laser induced decomposition of silane

  1. Gonzalez, P.
  2. Fernandez, M.D.
  3. Leon, B.
  4. Perez-Amor, M.
Revista:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 1996-756X 0277-786X

Any de publicació: 1989

Volum: 1022

Pàgines: 97-99

Tipus: Article

DOI: 10.1117/12.950108 GOOGLE SCHOLAR