Hydrogenated amorphous silicon films deposited by co2 laser induced decomposition of silane
- Gonzalez, P.
- Fernandez, M.D.
- Leon, B.
- Perez-Amor, M.
ISSN: 1996-756X, 0277-786X
Year of publication: 1989
Volume: 1022
Pages: 97-99
Type: Article
Journal:
Proceedings of SPIE - The International Society for Optical Engineering