Hydrogenated amorphous silicon by infrared multiphoton absorption with a pulsed CO2-laser

  1. Roth, A.
  2. Chiussi, S.
  3. Dietrich, T.R.
  4. Comes, F.J.
Revue:
Berichte der Bunsengesellschaft/Physical Chemistry Chemical Physics

ISSN: 0005-9021

Année de publication: 1990

Volumen: 94

Número: 10

Pages: 1105-1110

Type: Article

DOI: 10.1002/BBPC.19900941010 GOOGLE SCHOLAR