Effects of r.f. power on optical and electrical properties of plasma-deposited hydrogenated amorphous silicon thin films
- Andújar, J.L.
- Kasaneva, J.
- Serra, J.
- Canillas, A.
- Roch, C.
- Morenza, J.L.
- Bertran, E.
ISSN: 0924-4247
Argitalpen urtea: 1993
Alea: 37-38
Zenbakia: C
Orrialdeak: 733-736
Mota: Artikulua