AlxTayOz mixture coatings prepared using atomic layer deposition for corrosion protection of steel

  1. Härkönen, E.
  2. Díaz, B.
  3. Światowska, J.
  4. Maurice, V.
  5. Seyeux, A.
  6. Fenker, M.
  7. Tõth, L.
  8. Radnõczi, G.
  9. Marcus, P.
  10. Ritala, M.
Journal:
Chemical Vapor Deposition

ISSN: 0948-1907 1521-3862

Year of publication: 2013

Volume: 19

Issue: 4-6

Pages: 194-203

Type: Article

DOI: 10.1002/CVDE.201207028 GOOGLE SCHOLAR