Electrochemical and time-of-flight secondary ion mass spectrometry analysis of ultra-thin metal oxide (Al2O3 and Ta2O 5) coatings deposited by atomic layer deposition on stainless steel

1. Díaz, B.
2. Światowska, J.
3. Maurice, V.
4. Seyeux, A.
5. Normand, B.
6. Härkönen, E.
7. Ritala, M.
8. Marcus, P.