EXCIMER LASER CVD OF SILICON-OXIDE ON GAAS - A COMPARISON WITH DEPOSITION ON C-SI
- GONZALEZ, P
- GARCIA, E
- POU, J
- FERNANDEZ, D
- LEON, B
- PEREZAMOR, M
- BOYD, IW (coord.)
ISBN: 0-444-89419-5
Datum der Publikation: 1992
Ausgabe: 24
Seiten: 108-111
Kongress: SYMP ON LASER SURFACE PROCESSING AND CHARACTERIZATION, AT THE 1991 SPRING MEETING OF THE EUROPEAN MATERIALS RESEARCH SOC / INTERNATIONAL CONF ON ADVANCED MATERIALS
Art: Konferenz-Beitrag