Changes in structure and composition of silicon oxide thin films induced by ultraviolet illumination

  1. Parada, EG
  2. Gonzalez, P
  3. Leon, B
  4. PerezAmor, M
  5. DaSilva, MF
  6. Soares, JC
  7. Fernandez, A
  8. GonzalezElipe, AR
Büchersammlung:
THIN FILMS - STRUCTURE AND MORPHOLOGY
  1. Moss, SC (coord.)
  2. Ila, D (coord.)
  3. Cammarata, RC (coord.)
  4. Chason, EH (coord.)
  5. Einstein, TL (coord.)
  6. Williams, ED (coord.)

ISSN: 0272-9172

ISBN: 1-55899-345-2

Datum der Publikation: 1997

Ausgabe: 441

Seiten: 211-216

Kongress: Symposium on Thin Films - Structure and Morphology

Art: Konferenz-Beitrag

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Fuente de los datos: WoS