Changes in structure and composition of silicon oxide thin films induced by ultraviolet illumination
- Parada, EG
- Gonzalez, P
- Leon, B
- PerezAmor, M
- DaSilva, MF
- Soares, JC
- Fernandez, A
- GonzalezElipe, AR
- Moss, SC (coord.)
- Ila, D (coord.)
- Cammarata, RC (coord.)
- Chason, EH (coord.)
- Einstein, TL (coord.)
- Williams, ED (coord.)
ISSN: 0272-9172
ISBN: 1-55899-345-2
Argitalpen urtea: 1997
Alea: 441
Orrialdeak: 211-216
Biltzarra: Symposium on Thin Films - Structure and Morphology
Mota: Biltzar ekarpena