Tuning size and coverage of Pd nanoparticles using atomic layer deposition

1. Feng, J.-Y.
2. Ramachandran, R.K.
3. Solano, E.
4. Minjauw, M.M.
5. Van Daele, M.
6. Vantomme, A.
7. Hermida-Merino, D.
8. Coati, A.
9. Poelman, H.
10. Detavernier, C.
11. Dendooven, J.