ANGEL MANUEL
FERNANDEZ DOVAL
PROFESOR/A TITULAR DE UNIVERSIDAD TC
ELENA BEATRIZ
MARTIN ORTEGA
CATEDRATICO/A DE UNIVERSIDAD TC
Publications dans lesquelles il/elle collabore avec ELENA BEATRIZ MARTIN ORTEGA (1)
2023
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Pulsed 193 nm Excimer laser processing of 4H–SiC (0001) wafers with radiant exposure dependent in situ reflectivity studies for process optimization
Materials Science in Semiconductor Processing, Vol. 168