*Escola De Enxeñaría De Telecomunicación
Centre
Helmholtz-Zentrum Dresden-Rossendorf
Dresde, AlemaniaPublications in collaboration with researchers from Helmholtz-Zentrum Dresden-Rossendorf (1)
2014
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Dopant profile engineering using ArF excimer laser, flash lamp and spike annealing for junction formation
Proceedings of the International Conference on Ion Implantation Technology