Dopant profile engineering using ArF excimer laser, flash lamp and spike annealing for junction formation
- Scheit, A.
- Lenke, T.
- Bolze, D.
- Chiussi, S.
- Stefanov, S.
- Gonzalez, P.
- Schumann, T.
- Skorupa, W.
Actas:
Proceedings of the International Conference on Ion Implantation Technology
ISBN: 978-1-4799-5212-0
Ano de publicación: 2014
Tipo: Achega congreso