CINTECX
Ikerketa zentroa
Arizona State University
Tempe, Estados UnidosArizona State University-ko ikertzaileekin lankidetzan egindako argitalpenak (1)
2013
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Study of dopant activation in biaxially compressively strained SiGe layers using excimer laser annealing
Journal of Applied Physics, Vol. 113, Núm. 20