System for laser writing to lithograph masks for integrated optics

  1. Salgueiro, J.R.
  2. Roman, J.F.
  3. Moreno, V.
Journal:
Optical Engineering

ISSN: 0091-3286

Year of publication: 1998

Volume: 37

Issue: 4

Pages: 1115-1123

Type: Article

DOI: 10.1117/1.601945 GOOGLE SCHOLAR
Data source: Scopus