Capas de a-SiN:H modificadas mediante la irradiación con un láser de excímero

1. Pérez-Martínez Pérez-Amor, Mariano
2. Banerji, Natalie
3. Lusquiños Rodríguez, Fernando
4. Chiussi, Stefano
5. León Fong, Betty Mireya
6. Serra Rodríguez, Julia

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DOI: 10.3989/REVMETALM.1998.V34.I2.682 DIALNET GOOGLE SCHOLAR lock_openOpen access editor

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