Silicon oxide films deposited by excimer laser chemical vapour deposition
- Szorenyi, T.
- Gonzalez, P.
- Fernandez, M.D.
- Pou, J.
- Leon, B.
- Perez-Amor, M.
ISSN: 0040-6090
Année de publication: 1990
Volumen: 194
Número: 1 -2 pt 2
Pages: 619-626
Type: Article