Large area silica films deposited on silicon substrates by a CO2 laser

Szorenyi, Tamas
Gonzalez, Pio
Fernandez, Dolores
Pou, Juan
Leon, Betty
Perez-Amor, Mariano

Proceedings:

Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 0819403261

Year of publication: 1990

Volume: 1279

Pages: 144-149

Type: Conference paper

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Data source: Scopus