Large area silica films deposited on silicon substrates by a CO2 laser

  1. Szorenyi, Tamas
  2. Gonzalez, Pio
  3. Fernandez, Dolores
  4. Pou, Juan
  5. Leon, Betty
  6. Perez-Amor, Mariano
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 0819403261

Year of publication: 1990

Volume: 1279

Pages: 144-149

Type: Conference paper