Large area silica films deposited on silicon substrates by a CO2 laser

  1. Szorenyi, Tamas
  2. Gonzalez, Pio
  3. Fernandez, Dolores
  4. Pou, Juan
  5. Leon, Betty
  6. Perez-Amor, Mariano
Aktak:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 0819403261

Argitalpen urtea: 1990

Alea: 1279

Orrialdeak: 144-149

Mota: Biltzar ekarpena

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Datuen iturria: Scopus