Photo-induced chemical vapour deposition of silicon oxide thin films

  1. González, P.
  2. Fernández, D.
  3. Pou, J.
  4. García, E.
  5. Serra, J.
  6. León, B.
  7. Pérez-Amor, M.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 1992

Volume: 218

Issue: 1-2

Pages: 170-181

Type: Article

DOI: 10.1016/0040-6090(92)90916-Y GOOGLE SCHOLAR
Data source: Scopus