Hydrogen incorporation in silicon oxide films deposited by ArF laser-induced chemical vapor deposition
- Parada, E.G.
- González, P.
- Serra, J.
- León, B.
- Pérez-Amor, M.
- da Silva, M.F.
- Wolters, H.
- Soares, J.C.
Aldizkaria:
Journal of Non-Crystalline Solids
ISSN: 0022-3093
Argitalpen urtea: 1995
Alea: 187
Orrialdeak: 75-80
Mota: Artikulua